HIS - Vacuum Components Weld Fittings and Tubing

GENERAL

HIS is pleased to offer vacuum valves designed and manufactured for research and production application. These valves are the result of a long and careful development program designed to insure product quality, reliability and value. Every effort has been made to provide a valve family suited to the requirements of various users. They will function reliably in applications ranging from semiconductor production system with chemical and particulate contamination.

> Download Valve Catalog (~1mb PDF)

FEATURES

  • Long life operation.
  • Stainless steel welded bellows seal.
  • Manual and electropneumatic actuation or fail safe operators (closes in the event of air pressure loss).
  • Bakeable to 200°C intermittently, Viton seal bonnet.
  • Compact size.
  • Simple and fast maintenance.
  • Simple control via solenoid valve with manual override.
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